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研究了用磁控溅射法在橡胶片上得到的纳米金属膜和纳米金属氧化物膜的结构与性能,证明该纳米膜具有团簇结构。
The structure and properties of nano-metal films and nano-metal oxide films obtained by magnetron sputtering on rubber sheets were investigated. The results show that the nano-films have a cluster structure.