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如果一种薄膜材料能同时被用来制作电容器和电阻器,将会给薄膜混合集成电路的制造带来很大的方便。而钽硅薄膜正是这样一种薄膜材料。 钽硅薄膜通常用反应溅射和共溅射方法制备;也有用烧结的合金为靶,进行阴极溅
If a thin film material can be used to make capacitors and resistors at the same time, it will be very convenient for manufacturing thin film hybrid integrated circuits. The tantalum silicon film is such a thin film material. Tantalum-silicon thin films are typically prepared by reactive sputtering and co-sputtering methods; sintered alloys are also used as targets for cathodic sputtering