综述了金属多层膜固相反应研究现状。着重阐述了组元结构差异以及不对称扩散偶中快扩散组元对固相反应的影响。另外，也介绍了非晶膜晶化时第一相形成的判据 The research status of solid state reaction of metal multilayers is reviewed. Emphasis is placed on the differences in the structure of the elements and the influence of the rapidly diffusing elements in the asymmetric diffusion pair on the solid-phase reaction. In addition, the criteria for the formation of the first phase during amorphous film crystallization are also introduced