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电光与控制2015年第22卷第12期目录
【出 处】
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电光与控制
【发表日期】
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2015年22期
其他文献
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期刊
采用时域有限差分法研究了硒化锌基底的抛物线型周期阵列仿生微结构的光学性质,重点分析了微结构阵列的周期、高度、占空比和形状轮廓等对反射率的影响,得到了有较好增透效果的结构参数。根据模拟参数进行两次干涉曝光制备掩模,采用反应离子刻蚀技术制备周期阵列微结构。通过场发射扫描电子显微镜对微结构的表面形貌进行表征,并采用傅里叶变换红外光谱仪在中红外波段分别对双面抛光、单面微结构的硒化锌片进行透过率测试。结果表明:单面微结构样品在2~5 μm范围内的整体平均透过率比双面抛光硒化锌基片提高了10%,在2.3 μm处的最大
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