Impact of Arsenic Related Defects on Electronic Performance of ZrO_2/GaAs:Density Functional Theory

来源 :Chinese Physics Letters | 被引量 : 0次 | 上传用户:owg
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Arsenic can diffuse into high-κ dielectrics during GaAs-based metal oxide semiconductor transistor process,which causes the degradation of gate dielectrics.To explore the origins of the degradation,we employ nonlocal B3 LYP hybrid functional to study arsenic related defects in ZrO_2.Via band alignments between the GaAs and ZrO_2,we are able to determine the defect formation energy in the GaAs relative to the ZrO_2 band gap and assess how they will affect the device performance.Arsenic at the interstitial site serves as a source of positive fixed charge while at the oxygen or zirconium substitutional site changes its charge state within the band gap of GaAs.Moreover,it is found that arsenic related defects produce conduction band offset reduction and gap states,which will increase the gate leakage current. Arsenic can diffuse into high-κ dielectrics during GaAs-based metal oxide semiconductor transistor process, which causes the degradation of gate dielectrics. To explore the origins of the degradation, we employ nonlocal B3 LYP hybrid functional to study arsenic related defects in ZrO_2.Via band alignments between the GaAs and ZrO_2, we are able to determine the defect formation energy in the GaAs relative to the ZrO_2 band gap and assess how they will affect the device performance. Arsenic at the interstitial site serves as a source of the positive fixed charge while at the oxygen or zirconium substitutional site changes its charge state within the band gap of GaAs. Moreover, it is found that arsenic related defects produce conduction band offset reduction and gap states, which will increase the gate leakage current.
其他文献
We design and fabricate 4H-S1 C UV avalanche photodiodes(APDs) with positive beveled mesa,which exhibit low leakage current and high avalanche gain when working
21世纪全球竞争由价格转向质量,对于原材料占整个产品成本70%的五金制品企业来讲,质量成本管理就成为企业能否在竞争中立于不败之地,经久不衰的关键。但质量成本管理不同于其
摘 要:随着扩招和新校区建设的推进,招生规模扩大了,教学条件改善了,学校竞争力提高了。但是伴随的是学校发展面临资金瓶颈,债务负担加重了,财务风险增大了。本文从高校债务形成原因的分析入手,提出了化解高校债务、防范财务风险的对策建议。  关键词:高校债务;存在问题;化解对策  随着竞争机制进入高等教育领域,高校面临前所未有的竞争。特别是新校区的建设,虽然增加了招生规模,更新了教学设备,改善了高校的办学
A new interlayer is successfully used to be a universal carrier switch,developing high-performance hybrid white organic light-emitting diodes(WOLEDs).By dint of
潼关河段射流清淤试验从 1 996年开始 ,至今已进行了 4年。 4年来试验规模不断扩大 ,内容不断增加 ,管理不断完善 ,研究也在不断深入。通过野外试验及室内研究工作 ,并结合汛
Effects of abrasive concentration on material removal rate(MRR) and surface quality in the chemical mechanical polishing(CMP) of light-emitting diode sapphire s
《明清以来苏州社会史碑刻集》是国内正式出版的第一本社会史碑刻集,共收录500篇碑文,分社会角色与社会群体、社会生活与社会合作、社会信仰与社会心态、社会问题与社会管理4大类,立
An ultralow specific on-resistance(R_(on,sp)) trench metal-oxide-semiconductor field effect transistor(MOSFET)with an improved off-state breakdown voltage(BV) i
哈尔滨曾有过众多的东正教堂。这些教堂的建筑给人们留下了深刻印象,同时也留下了许多回忆。 东正教堂的建立是中东铁路(原名东清铁路)的产物。而中东铁路又是沙俄殖民主义者侵
随着印刷业国内外竞争碰撞加剧,企业获利空间越来越小,为了能够保证企业持久的发展,必须对企业中的各类成本进行控制,以提高企业的核心竞争力。因此,笔者结合了公司内部一些