论文部分内容阅读
The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0~0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.
The analytical and finite element analyzes of circular resonators for Resonant Pressure Sensors are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0 ~ 0.1 Mpa. The natural frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.