论文部分内容阅读
介绍在聚酰亚胺基底上由溅射方法制备热敏薄膜的工艺条件对膜热敏特性的影响。合理的选择薄膜的制备工艺条件和热处理条件可以得到良好特性的热敏薄膜，其温度系数大于４５００ｐｐｍ／℃，并具备良好的机械性能
The influence of the process conditions on the thermosensitive properties of the polyimide film prepared by the sputtering method on the polyimide substrate is described. Reasonable choice of film preparation process conditions and heat treatment conditions can be good characteristics of the thermal film, the temperature coefficient greater than 4500ppm / ℃, and have good mechanical properties