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Based on the practical situation of nondestructive examination,the calculation model of the composite scattering is established by using a three-dimensional half-space finite difference time domain,and the Monte Carlo method is used to solve the problem of the optical surface with roughness in the proposed scheme.Moreover,the defect particles are observed as periodic particles for a more complex situation.In order to obtain the scattering contribution of defects inside the optical surface,a difference radar cross section is added into the model to analyze the selected calculations on the effects of numbers,separation distances,different depths and different materials of defects.The effects of different incident angles are also discussed.The numerical results are analyzed in detail to demonstrate the best position to find the defects in the optical surface by detecting in steps of a fixed degree for the incident angle.