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用电子能量损失谱(EELS)研究了金刚石膜、类金刚石膜和高取向石墨的特征能量损失峰.金刚石膜的特征峰主要是5.4eV和15eV的带间跃迁,23eV和34eV的表面等离子激元和体等离子激元.类金刚石膜的特征峰主要是 4.5eV的π电子的体等离子激元,13eV的带间跃迁,22.4eV的(π+ σ)电子的体等离子激元.石墨的特征峰主要是6eV的π电子的等离子激元,13eV带间跃迁和C轴方向等离子激元,20eV的C轴方向的等离子激元和25.6eV的基面等离子激元.比较了α-C和α-C:H能量损失谱和喇曼光谱,利用hω_(p(π+σ))和hω_(p(x))峰位计算了类金刚石膜中sp~3键和sp~2键的比例.研究了不同CH_4浓度生长的金刚石膜的能量损失谱,利用hω_(p(π+σ))和hω_(p(x))峰位计算金刚石膜中类金刚石第二相内的sp~2键和sp~3键的比例,利用第二相的体等离子激元损失峰hω_(p(π+σ))与金刚石的体等离子激元损失峰hω_(p(σ))的强度比来估价第二相的多少.
The characteristic energy loss peaks of diamond films, diamond-like carbon films and highly oriented graphite films were studied by electron energy loss spectroscopy (EELS). The characteristic peaks of diamond films were mainly band-to-band transitions of 5.4eV and 15eV, surface plasmon polaritons of 23eV and 34eV And bulk plasmon. The main peaks of the diamond-like carbon film are the bulk plasmon of π-electron of 4.5eV, the band-gap of 13eV, bulk plasmon of (π + σ) electron of 22.4eV, Mainly 6eV π-electron plasmon, 13eV band-transition and C-axis plasmon, 20eV C-axis plasmon and 25.6eV basal plasmon.Comparing α-C and α- C: H energy loss spectra and Raman spectra were used to calculate the ratio of sp ~ 3 and sp ~ 2 bonds in diamond-like carbon films using the peak positions of hω_ (p (π + σ)) and hω_ (p The energy loss spectra of diamond films grown with different concentrations of CH_4 were calculated and the sp ~ 2 bonds and sp (subscript 2) in the second phase of diamond - like carbon film were calculated by using the peak positions of hω_ (p (π + σ)) and hω_ ~ 3 bond ratio, using the second phase bulk plasmon loss peak hω_ (p (π + σ)) and diamond bulk plasmon loss peak hω_ (p (σ)) of the intensity ratio to estimate How much of the second phase.