论文部分内容阅读
本文介绍了一种适用于量测热阴极次级发射特性的扫描电子探针法,原电子探束束斑直径为50—100μm,束流小于10~(-7)A,原电子能量不大于3kV。该装置能定点测量热阴极表面上感兴趣点的次级发射系数δ与原电子能量间的关系曲线(δ-E_p);也能以扫描方式在短时间内测出整个热阴极表面的次级发射分布,从而求得次级发射的定量分布曲线(f-δ)。该装置在电视制式的扫描方式工作时,能观察热阴极表面的次级发射图象。 对纯镍样品的测量表明:该装置具有比单枪定点法更多的优点和更高的精度。由于该装置简便灵活,便于与热阴极研究的特殊需要相结合,因此,可望在热阴极的研究中发挥作用。
This paper introduces a scanning electron probe method suitable for measuring the secondary emission characteristics of a hot cathode. The original electron beam has a beam spot diameter of 50-100 μm, a beam current of less than 10 -7 A, an electron energy of not more than 3kV. The device can measure the secondary emission coefficient δ of the point of interest on the hot cathode surface by point and the relation curve (δ-E_p) between the primary electron energy and the secondary electrode of the whole hot cathode surface in a short time Emission distribution, so as to obtain the secondary emission quantitative distribution curve (f-δ). The device is capable of observing the secondary emission image of the hot cathode surface while operating in the television mode scanning mode. Measurement of pure nickel samples showed that the device has more advantages and higher accuracy than the single-shot pointing method. Because of its simplicity and flexibility, it is easy to combine with the special needs of hot cathode research and is therefore expected to play a role in hot cathode research.