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The zirconia containing 12wt%Y_2O_3 thin films deposited by r.f. magnetron sputtering at 25℃ or 400℃, and then bombarded with Ar~+ beam at room temperature were characterized with XRD before and after Ar~+ bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T’ phase appeared after Ar~+ irradiation and the content of the T’ phase increased with the increase of Ar+ ion doses from 5 ×10~(15) to 6×10~(16) ions cm~(-2).
The zirconia containing 12wt% Y_2O_3 thin films deposited by rf magnetron sputtering at 25 ℃ or 400 ℃, and then bombarded with Ar ~ + beam at room temperature were characterized with XRD before and after Ar ~ + bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T ’phase occurred after Ar ~ + irradiation and the content of the T’ phase increased with the increase of Ar + ion doses from 5 × 10 ~ (15) to 6 × 10 ~ (16) ions cm ~ (-2).