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本文提出了一种与硅栅ＣＭＯＳ工艺相兼容的集成ＣＭＯＳ流量传感器，该器件由于采用了交叉差分恒流源技术，与硅双极型流量传感器相比，具有相近的灵敏度。
This paper presents an integrated CMOS flow sensor compatible with a silicon gate CMOS process that has similar sensitivity as silicon bipolar flow sensors due to the use of a cross-difference constant current source technology.