本文介绍了一种新型的全自动光电光栅精密螺距测量仪器。它利用双频激光干涉仪对粗光栅测量系统进行一次性标定,并借助于微计算机的智能特性,将标定结果存入机内,以便对以后的测量结果进行修正。这样大大降低了成本和对使用环境条件的要求,同时提高了粗光栅的测量精度。它是一种工作稳定,操作方便,精度高,成本低,适用性强的高效测量仪。 This article describes a new type of automatic optical grating precision pitch measuring instruments. It uses double-frequency laser interferometer to calibrate the coarse grating measurement system once, and uses the microcomputer’s intelligence to store the calibration results in the machine so as to correct the measurement results later. This greatly reduces the cost and requirements of the use of environmental conditions, while improving the coarse grating measurement accuracy. It is a stable, easy to operate, high precision, low cost, high applicability and efficient measuring instrument.