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1概述接触式干涉仪(以下简称干涉仪)是应用光波干涉原理,采用微差比较测量法测量长度的高精度计量仪器。干涉仪由前苏联计量仪器专家乌威尔斯基设计并制造,因此通常称为乌氏干涉仪。干涉仪主要用于检定尺寸小于150mm的3等及以下量块的尺寸,也可以对其他高精度零件进行精密测量或作高精度测量的定位。
1 Overview Contact interferometer (hereinafter referred to as the interferometer) is the application of light wave interference principle, the use of differential measurement method to measure the length of high-precision measurement instruments. Interferometers were designed and manufactured by Uwellski, a former Soviet metrology instrumentation specialist, and are therefore commonly referred to as U-shaped interferometers. Interferometer is mainly used to test the size of the third-grade and below measuring block whose size is less than 150mm. It can also perform precision measurement on other high-precision components or position for high-precision measurement.