Novel LDNMOS embedded SCR with strong ESD robustness based on 0.5 μm 18 V CDMOS technology

来源 :Journal of Central South University | 被引量 : 0次 | 上传用户：zippomu

【摘要】

：

A novel LDNMOS embedded silicon controlled rectifier(SCR) was proposed to enhance ESD robustness of high-voltage(HV) LDNMOS based on a 0.5 μm 18 V CDMOS proces

【作者】

：

汪洋金湘亮周阿铖

【机构】

：

FacultyofMaterials,HunanEngineeringLaboratoryforMicroelectronics

【出处】

：

Journal of Central South University

【发表日期】

：

2015年2期

【关键词】

：

DMOS工艺防护性能 ESD SCR 嵌入式小说可控硅整流器器件仿真 LDNMOS embedded SCR TCAD simulation ele

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A novel LDNMOS embedded silicon controlled rectifier(SCR) was proposed to enhance ESD robustness of high-voltage(HV) LDNMOS based on a 0.5 μm 18 V CDMOS process. A two-dimensional(2D) device simulation and a transmission line pulse(TLP) testing were used

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Novel LDNMOS embedded SCR with strong ESD robustness based on 0.5 μm 18 V CDMOS technology

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