为抑制Φ600mm相移式菲佐干涉仪中波长调谐误差以及振动带来的测量误差,提出了一种可用于波长调谐移相干涉仪的误差校正方法。将4幅载频干涉图按列交叠重构得到时空条纹图,由于载频的存在实现了误差谱与相位谱的分离,提取相位谱就可以正确解包相位。存在波长调谐误差和振动的情况下,仿真结果表明利用载频交叠重构干涉术,相位恢复精度是传统移相算法精度的10倍以上;实验结果显示,载频交叠重构干涉术的测量精度为0.0066λ。利用载频交叠重构干涉术能够有效抑制Φ600干涉仪中波长调谐误差与振动造成的测量误差。 In order to suppress the error of wavelength tuning and the measurement error caused by vibration in Φ600mm phase-shift Fischer interferometer, an error correction method which can be used in wavelength-tunable phase-shift interferometer is proposed. Four interferograms of carrier frequency are overlapped and reconstructed in columns to obtain the spatiotemporal fringe pattern. Because of the existence of carrier frequency, the error spectrum and the phase spectrum are separated, and the phase spectrum can be extracted to extract the phase. The simulation results show that the accuracy of phase recovery is more than 10 times that of the traditional phase-shifting algorithm. The experimental results show that the accuracy of phase-shift reconstruction is higher than that of traditional phase-shifting reconstruction algorithm. Measurement accuracy of 0.0066λ. The use of overlapped reconstruction of carrier frequency interferometry can effectively suppress the measurement errors caused by wavelength tuning errors and vibration in the Φ600 interferometer.