四氯化硅是西门子法多晶硅生产中副产物,其循环使用是长期制约我国多晶硅低成本生产的关键因素,但其氢化条件苛刻,温度在520~580℃,压力2.5~3.8MPa,临氢,循环生产周期短,需3个月~6个月检修和更换,生产效率低下,其更换更带来大量的三废排放,给环境带来污染。在我国,如何高效、稳定运行多晶硅循环生产的多晶硅冷氢化装置,一直是业界 Silicon tetrachloride is a by-product of the polysilicon production by Siemens method. Its recycle is the key factor that restricts the low-cost production of polysilicon in China for a long time. However, its hydrogenation conditions are harsh. The temperature is 520-580 ℃ and pressure is 2.5-3.8 MPa, Cycle short production cycle, take 3 months to 6 months overhaul and replacement, production efficiency is low, the replacement also brings a lot of waste emissions, to the environment pollution. In our country, how to efficiently and stably operate the polycrystalline silicon cold hydrogenation device which is produced by the polysilicon cycle has always been the industry