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采用Kretschmann结构激发表面等离子体,利用多孔陶瓷材料SiO2作感湿材料,当外界环境的相对湿度变化时,引起感湿层SiO2的折射率发生相应变化,导致表面等离子体共振角发生偏移.采用有限元法对传感系统在不同感湿层折射率下的反射谱进行了模拟分析,并根据反射谱的共振半峰宽和共振峰深度对金膜的厚度进行优化.研究结果表明:金膜的最佳厚度为55nm,反射谱的共振角偏移量与感湿层折射率变化呈线性关系,湿度检测的分辨率高达0.37%RΗ,灵敏度达到0.03°/%RH.该研究对基于表面等离子体共振原理的湿度传感器的研制与应用具有一定意义.
The Krebschmann structure is used to excite the surface plasmons, and the porous ceramic material SiO2 is used as the humidity-sensitive material. When the relative humidity of the external environment changes, the refractive index of the wetting layer SiO2 changes correspondingly, resulting in the shift of the surface plasmon resonance angle. Finite element method was used to simulate the reflection spectra of the sensing system under the different refractive indices of the wetting layer and the thickness of the gold film was optimized according to the resonant half width of the reflection spectrum and the resonance peak depth.The results show that the gold film The optimum thickness is 55 nm, the resonance angle offset of the reflection spectrum is linear with the refractive index of the wetting layer, the resolution of the humidity detection is up to 0.37% RH, and the sensitivity reaches 0.03% /% RH. Body resonance principle of the humidity sensor research and application of some significance.