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相位提取的精度直接影响相移干涉测量的精度。在变频相移干涉测量中,相移量由干涉腔长和波长变化量决定,必须对测试系统进行相位标定,但常因相位标定不精确而引入相移误差,影响相位提取的精度。运用一种基于迭代的相位求解算法,该算法无需对测试系统进行相位标定,可以在被测相位和相移量均未知的情况下,通过交替迭代法求解出被测相位。通过仿真比较了传统四步相移和基于迭代的相位求解算法的相位提取精度,结果表明,基于迭代的相位求解算法的相位提取精度优于传统四步相移算法的精度。
The accuracy of phase extraction directly affects the accuracy of phase-shift interferometry. In frequency-shift phase-shift interferometry, the amount of phase shift is determined by the length of the interfering cavity and the wavelength variation. The phase calibration must be performed on the test system. However, phase-shift errors are often introduced due to inaccurate phase calibration, which affects the precision of phase extraction. Using an iterative phase solving algorithm, the proposed algorithm can eliminate the need for phase calibration of the test system and can obtain the measured phase by alternating iterative methods when the measured phase and the amount of phase shift are unknown. The phase extraction accuracy of the traditional four-step phase-shifting and iterative-based phase-solving algorithm is compared by simulation. The results show that the phase-extraction accuracy of the iterative-based phase-solving algorithm is better than that of the traditional four-phase phase-shift algorithm.