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影响气流式传感器性能的因素有工艺结构设计、检测电路的设计等，作者用理论和实验的方法对其进行了分析和研究，结果证明选择合理的工艺结构、适当的电源电压，可提高气流式加速度传感器的性能。
The factors influencing the performance of the air flow sensor are the design of the process structure and the design of the detection circuit. The author has analyzed and researched with the theory and the experiment method. The result shows that choosing proper process structure and proper supply voltage can improve the air flow Acceleration sensor performance.