介绍了几种高密度等离子体源，重点叙述了新近出现的电感耦合等离子体源ＩＣＰＳ。说明了ＩＣＰＳ的基本原理、结构特点、电磁场分布的数学模型等。还简单介绍了其应用前景和目前存在的问题。 Several high density plasma sources are introduced, highlighting the recent occurrence of inductively coupled plasma source ICPS. Describes the basic principles of ICPS, structural characteristics, the mathematical model of electromagnetic field distribution. It also briefly introduces its application prospects and the current problems.