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采用磁控溅射法在316L不锈钢基体上分别沉积单层Al2O3膜、单层Au膜以及Al2O3/Au/Al2O3层状薄膜。采用气相渗透法在500℃,氘分压为0.06 MPa条件下测试了薄膜的阻氘性能。结果表明,3种薄膜氘渗透后,薄膜的形貌良好,无开裂、无剥落的现象,氘渗透率减低因子均比316L不锈钢基材增大一个数量级以上,阻氘效能按单层Al2O3膜、单层Au膜以及Al2O3/Au/Al2O3层状薄膜依次递升。Al2O3/Au/Al2O3层状薄膜的优异阻氘效能可归因于,延性的Au夹层使层状薄膜的力学性能得到显著提高;Al2O3层能阻止Au与基体间互扩散,使Au能充分发挥阻氘效能。本研究表明,由贵金属与陶瓷阻氚材料构成的层状薄膜是发展阻氚涂层的新途径。
Single-layer Al2O3 film, single-layer Au film and Al2O3 / Au / Al2O3 layered film were deposited on 316L stainless steel substrate by magnetron sputtering. The gas barrier method was used to test the deuterium resistance of the films at 500 ℃ and the partial pressure of deuterium was 0.06 MPa. The results show that the morphology of the films is good, no cracking and no peeling after the deuterium infiltration. The deuterium permeability decreases more than one order of magnitude more than the 316L stainless steel substrate, The single-layer Au film and the Al2O3 / Au / Al 2 O 3 layered film gradually increase. The excellent deuterium resistance of Al 2 O 3 / Au / Al 2 O 3 lamellar films can be attributed to the ductile Au interlayers that improve the mechanical properties of the lamellar films. The Al 2 O 3 layer can prevent the interdiffusion between Au and the matrix, Deuterium efficacy. This study shows that the layer of thin film made of noble metal and ceramic tritium blocking material is a new way to develop a tritium-blocking coating.