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纳米压痕法在确定纳米结构材料,特别是具有较大高宽比的一维纳米结构/对象的力学特性时,若纳米结构沿压入方向的等效刚度远小于针尖-样品的接触刚度,应用常规数据分析(Oliver-Pharr)模型会导致较大的测量偏差.对常规Oliver-Pharr解析模型进行了推广,以补偿一维纳米材料等效刚度对测量结果的影响,进而提出了适用于此类测量对象的通用纳米压痕分析模型,并应用于分析柱状微纳米结构的准静态压痕测量数据.实验中应用原子力显微镜(AFM)定量测量了湿法刻蚀获得的一维单晶硅柱状结构的几何参数(包括硅纳米柱的直径和长度).实验结果表明,应用常规模型分析对较大高宽比的硅纳米柱(直径386 nm,长500 nm)的压痕数据会导致大于50%的偏差.应用修正模型分析实验数据时,测量结果不受被测对象几何参数的影响,因而可以有效提高应用纳米压痕法对微纳米结构材料,特别是一维材料的测量精度.
Nano-indentation method In determining the mechanical properties of nanostructured materials, especially one-dimensional nanostructures / objects with large aspect ratios, if the equivalent stiffness of the nanostructures in the direction of press-in is much less than the contact stiffness of the tip- The application of the Oliver-Pharr model leads to large measurement deviations.The general Oliver-Pharr analytical model is generalized to compensate for the effect of the equivalent stiffness of one-dimensional nanomaterials on the measurement results, Type nano-indentation analysis model and applied to the analysis of the quasi-static indentation measurement data of the columnar micro-nano structure. In the experiment, atomic force microscopy (AFM) The geometrical parameters of the structure, including the diameter and length of the silicon nanopillars, were calculated.The experimental results show that the indentation data of larger aspect ratio silicon nanorods (386 nm in diameter and 500 nm in length) % Of the deviation.Application of the revised model analysis of experimental data, the measurement results are not subject to the geometric parameters of the object, which can effectively improve the application of nano-indentation of micro-nano structure materials, special Do not be one-dimensional material measurement accuracy.