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提出了准分子激光器阳极预电离方案，并在实验上证实了阳极预能有效地改善放电均匀性，同时使激光输出能量略有提高。
The scheme of pre-ionization of excimer laser anode was put forward and the anode pre-charge was verified experimentally to improve the discharge uniformity effectively and at the same time make the laser output energy slightly increase.