Yb-doped silica glasses containing low, medium, and high content of OH are prepared through nanoporous glass sintering technology. High-OH sample exhibits better X-ray irradiation resistivity than low- and medium-OH samples. After irradiation, OH content of low- and medium-OH samples increases 37.5% and 11%, respectively; in contrast, OH content of high-OH sample decreases dramatically. The different OH content changes among the samples are discussed regarding the proposed inter-conversion reactions involving Si-H and Si-OH during the irradiation.