从事合作研发半导体的Sematech公司提出了一项旨在研究可用作硅MOSFET沟道这一硅基晶体管关键通路材料的研发计划。这项计划首先将研究重点集中在Ge和SiGe上,而长远来看是-族化合物材料。Sematech的前端工艺部将负责该项研究的前沿,目标是开发将沟道迁移率提高到超过硅物理极限 Sematech Inc., a cooperative semiconductor research and development company, has proposed a research and development program designed to investigate the key pathway material that can be used as a silicon-based transistor in silicon MOSFET channels. The program first focused its research on Ge and SiGe, and in the long run it was a family compound. Sematech’s Front End Processes will be at the forefront of the research, with the goal of developing devices that increase channel mobility beyond the physical limits of silicon