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为了提高用比较仪(包括干涉仪)测量线纹量具的准确度,近年来广泛地应用光电显微镜。由于这种光电显微镜具有很高的灵敏度,因此能够消除瞄准刻线的主观性,从而能提高测量准确度和使测量过程自动化。根据现有的文献资料,光电显微镜的灵敏度为0.01～0.006μm/μA。看起来,光电显微镜达到这样
In order to improve the accuracy of the linear measurement using a comparator (including an interferometer), a photoelectric microscope has been widely used in recent years. Because of the high sensitivity of such light microscopes, the subjectivity of sight lines can be eliminated, resulting in improved measurement accuracy and automation of the measurement process. According to the existing literature, the sensitivity of light microscope is 0.01 ~ 0.006μm / μA. Looks like this is achieved with a light microscope