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研究了一种基于碳纳米管尖端的直流介质阻挡放电(DBD)微结构,使用MEMS加工工艺制作出深宽比0.5的侧壁相对的叉指状金属电极,在电极上电泳多壁碳纳米管,采用真空磁控溅射沉积二氧化硅介质层。在大气压下测试了所制备的DBD微结构样品的直流放电基本特性。实验结果表明,在几伏特的直流加载电压下即可检测到纳安量级的放电电流,并且放电电流对人体呼吸和环境气体变化有明显响应。放电起始电压小于10V并显现出明显的抑制电流自由增长的DBD放电特征,但电流下降持续时间达102～103s量级,大于常规常压DBD时间,显示出碳纳米管尖端的特异效应。
A direct current dielectric barrier discharge (DBD) microstructure based on carbon nanotube tips was studied. A sidewall-facing interdigitated metal electrode with an aspect ratio of 0.5 was fabricated using a MEMS process. Electrodeposition of multi-walled carbon nanotubes , A vacuum magnetron sputtering deposition of silica dielectric layer. The basic properties of DC discharge of the prepared DBD microstructure samples were tested at atmospheric pressure. Experimental results show that nano-orders of magnitude discharge current can be detected at a few volts DC load voltage, and the discharge current has obvious response to human respiratory and environmental gas changes. The initial discharge voltage was less than 10V and the DBD discharge characteristics were obviously inhibited. However, the current descent duration was on the order of 102 ~ 103s, which was higher than that of the normal atmospheric DBD time, showing the specific effect of the nanotube tip.