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为满足微小型卫星星载推进系统小型化、微推力、高精度的需求,研制了一种基于MEMS技术的固体化学微推进器。该推进器具有低功耗、低点火能量阈值、无可动部件的特点,理论上具有较高的工作可靠性。介绍了推进器的结构设计、工艺流程,以及推进剂加注方法,并给出了已经加工完成的6×6单元阵列原理样机的推力预测和点火性能初步测试结果。样机瞬时点火功率小于1W,平均点火电压低于40V,理论推力约1.7mN。与同量级推力的电推进器相比,工作电压大大降低。
In order to meet the needs of miniaturization, micro-thrust and high-precision micro-satellite satellite propulsion system, a solid-state chemical micro-thruster based on MEMS technology was developed. The thruster has the characteristics of low power consumption, low ignition energy threshold, no moving parts and theoretically high working reliability. The structure design, process flow and propellants filling method are introduced. The thrust prediction and ignition test results of 6 × 6 unit array prototypes are given. The prototype instantaneous ignition power is less than 1W, the average ignition voltage is lower than 40V, the theoretical thrust of about 1.7mN. Compared with the same level thrust electric thruster, the operating voltage is greatly reduced.