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目前,绝大部分使用的平面衍射光栅,是在光栅刻划机刻出的光栅上复制出来的复制光栅。因此,由光栅刻划机刻出的光栅叫原刻光栅或母光栅。光栅刻划机是制造光栅的最主要设备。由于衍射光栅有精度要求高(一般在0.01微米数量级),刻划周期长(一般约五昼夜)的特点,光栅刻划机以及机器所处的条件必需与之相适应。我们已设计制造成功四台平面衍射光栅刻划机,机器所需恒温、隔振条件也已解决,现正着手设计第五台光栅刻划机,下面谈几点体会。
At present, most of the planar diffraction gratings used are duplicated gratings copied from the grating engraved by the grating scoring machine. Therefore, the grating engraved by the grating engraving machine called the original engraving or grating. Raster scoring machine is the main equipment grating. Due to the high accuracy of diffraction gratings (typically on the order of 0.01 microns) and the long scribing period (usually about five days and nights), the raster scribing machine and the machine conditions must be adapted. We have successfully designed and manufactured four planar diffraction grating scoring machines. The required thermostat and vibration isolation conditions of the machine have also been solved. Now we are planning to design the fifth grating scoring machine.