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针对目前纤毛式MEMS矢量水听器灵敏度和带宽的相互制约,无法实现在高灵敏度的情况下还能有较大的可测带宽。基于此,设计了一种单梁结构的一维MEMS矢量水听器,经理论分析和ANSYS仿真分析,确定了微结构的尺寸,仿真结果显示有挖空式结构较无挖空式结构在X轴最大应力上提高了5.12%,探测带宽增大了53.26%。并对挖空式微结构进行了工艺设计,简化了工艺流程,提高了成品率。最后,用矢量水听器校准装置进行测量,实验结果表明,该一维MEMS矢量水听器具有20~2 000 Hz的可测带宽,满足灵敏度每频程6 dB的增长趋势,具有良好的“8”字型指向性,凹点深度为-32.4 dB。
For the current cilia MEMS vector hydrophone sensitivity and bandwidth constraints, can not be achieved in the case of high sensitivity can have a larger measurable bandwidth. Based on this, a one-beam MEMS one-dimensional MEMS hydrophone with a single beam structure was designed. The theoretical analysis and ANSYS simulation analysis confirmed the size of the microstructure. The maximum axial stress increased by 5.12% and the detection bandwidth increased by 53.26%. The process design of the hollowed-out microstructure was simplified, the process flow was simplified and the yield was improved. Finally, the vector hydrophone calibration device is used for measurement. The experimental results show that the one-dimensional MEMS vector hydrophone has a measurable bandwidth of 20-2000 Hz, which meets the sensitivity of 6 dB per frequency and has a good trend of “8 ” font orientation, pit depth of -32.4 dB.