应用改造的原子力显微镜 (AFM )作为传感系统 ,配合精密回转气浮轴系和三维微定位装置 ,实现了对激光核聚变靶球圆周方位形状误差的精密测量。采用该测量技术获得的靶球表面几何参数的测量数据及分析结果可为制靶工艺提供检测手段 ,并为激光打靶实验提供准确的靶球表面形貌参数 A modified AFM (Atomic Force Microscope) was used as the sensing system, with the precise rotation of the flotation shaft and the three-dimensional micro-positioning device, to achieve the precise measurement of the circumferential azimuth shape error of the laser fusion target sphere. The measurement data and analysis results of the geometric parameters of the surface of the target sphere obtained by the measurement technology can provide a detection method for the target technology and provide accurate target surface morphology parameters for the laser target experiment