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使用双离子束溅射法制得了铁氮薄膜 ,随着基片温度的变化 ,薄膜的成分是ε Fe2～ 3N、γ′ Fe4 N或是二相的混合物 ,薄膜的晶粒尺寸随基片温度的升高而增大。以振动样品磁强计(VSM)测定了薄膜的磁性能。另外 ,研究了在基片温度为 16 0℃时 ,改变主源中通入N2 /Ar的比例对薄膜成分的影响
The ferroelectric thin films were prepared by the dual ion beam sputtering method. As the temperature of the substrate changed, the composition of the films was ε Fe2 ~ 3N, γ ’Fe4 N or a mixture of two phases. The grain size of the films varied with the substrate temperature Increase and increase. The magnetic properties of the films were measured by vibrating sample magnetometer (VSM). In addition, the effect of changing the proportion of N2 / Ar introduced into the main source on the film composition at a substrate temperature of 16 0 ℃ was studied