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大多数机械零件往往是由于磨损、腐蚀、疲劳等与表面有关的原因而导致失效。为了提高零件的使用寿命,除了正确地选择材料,合理地确定冷热加工工艺之外,改进零件表面性能,已成为重要的研究课题之一。用蒸镀方法在零件表面上,沉积一层与基体材料的物理化学性能不同的薄膜称之为,蒸镀薄膜技术。蒸镀薄膜的工艺,主要有化学气相沉积(CVD),溅射(Sputting)和各种离子镀(如离子镀Mattox法、射频离子镀RF.I.P、空心阴极型离子镀HCD.I.P、感应加热离子镀(I.Gum.I.P)、低压等离子
Most mechanical parts are often due to wear, corrosion, fatigue and other surface-related causes of failure. In order to improve the service life of parts, in addition to selecting the materials correctly and rationally determining the hot and cold processing technology, improving the surface properties of parts has become an important research topic. With the deposition method on the part surface, the deposition of a layer of the physical and chemical properties of the substrate with different properties of the film known as the evaporation film technology. The thin film deposition process mainly includes chemical vapor deposition (CVD), sputtering (Sputting) and various ion plating (such as Mattox ion plating, RF ion plating RF.IP, hollow cathode ion plating HCD.IP, induction heating Ion plating (I.Gum.IP), low pressure plasma