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真空紫外辐射有高于共价键键能的光子能量,可在室温下激起化学反应。自上世纪80年代,基于稀有气体介质阻挡放电的准分子真空紫外光灯面世以来,真空紫外光源有了很大的发展,商业化的准分子真空紫外光灯已有上百mW/cm2的光能输出,品种也不断增加。准分子真空紫外光灯强大的激发化学反应的能力已在材料科学、化学反应工程、生物医学等方面开拓了许多新的研究课题,并得到日益增多的实际应用。近20年,每年关于准分子真空紫外辐射材料加工的研究报道急剧增加,本文将简要介绍DBD准分子紫外光源的特点及其在材料加工中的研究和应用,包括无机薄膜制备、半导体材料氧化、材料表面清洗、过渡金属化合物还原、高分子合成和聚合物表面改性。
Vacuum ultraviolet radiation has a photon energy higher than that of the covalent bond energy and can cause a chemical reaction at room temperature. Since the 1980s, vacuum ultraviolet light sources have evolved greatly since the advent of rare-earth dielectric barrier discharge-based excimer vacuum UV lamps. Commercially available excimer vacuum UV lamps have produced hundreds of mW / cm2 of light Can output, species also continue to increase. The powerful ability of excimer vacuum UV lamp to stimulate chemical reactions has opened up many new research topics in material science, chemical reaction engineering and biomedicine, and has been increasingly used in practical applications. In recent 20 years, the research reports on the processing of excimer UV materials have been increasing dramatically. This article will briefly introduce the characteristics of DBD excimer UV sources and their applications in material processing, including inorganic thin film preparation, semiconductor material oxidation, Material surface cleaning, transition metal compound reduction, polymer synthesis and polymer surface modification.