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基于扩散方程 ,对LiNbO3 晶片Na+ 扩散进行了理论分析和实验研究。研究表明 ,LiNbO3 晶体的Na+ 扩散工艺宜选择Na2 CO3 和富锂LiNbO3 的混合物为扩散源 ,于 95 0～ 10 0 0℃扩散 2 0h。扩散可一定程度地保证Na+ 的均匀性。扩散层厚度以及Na+ 相对含量和扩散层厚度的关系与扩散时间密切相关 ,且Na+ 扩散进入LiNbO3 晶片的扩散源是相对变化的 ,表层为NaNbO3 ,其次是Li1-xNaxNbO3 ,x值随扩散的深入而变小。同时发现晶片的Na+ 扩散是以Na+ 替代Li+ 的方式进行的
Based on the diffusion equation, Na + diffusion in LiNbO3 wafers was theoretically analyzed and experimentally studied. The results show that the mixture of Na2CO3 and lithium-rich LiNbO3 should be selected as the diffusion source for the Na + diffusion process of LiNbO3 crystal and diffused for 20 h at 95 0 ~ 100 0 ℃. Diffusion can to some extent to ensure the uniformity of Na +. The relationship between the thickness of diffusion layer, the relative content of Na + and the thickness of diffusion layer is closely related to the diffusion time. The diffusive source of Na + diffused into LiNbO3 wafer is relative change, the surface is NaNbO3, followed by Li1-xNaxNbO3. Smaller It is also found that the Na + diffusion of the wafer is carried out by Na + instead of Li +