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详细阐述了一种全新单晶炉自动控制系统,该系统采用工业控制计算机为数据控制核心,上称重控制传感器进行晶体数据采集,利用感应加热或电阻加热方式控制单晶炉温场。通过对单晶炉控制系统特性研究和热场模型的正确推导,有效解决了系统温场及晶体结晶过程中引发的大滞后及系统非线性控制问题。试验结果表明,该系统控制稳定可靠,各项性能指标均达到国际先进水平。
A new single crystal furnace automatic control system is described in detail. The industrial control computer is used as the data control core. The weighing control sensor is used to collect the crystal data, and the temperature field of single crystal furnace is controlled by induction heating or resistance heating. Through the research on the characteristics of single crystal furnace control system and the correct derivation of the thermal field model, the large temperature lag and the system nonlinear control problems caused by the system temperature field and the crystal crystallization process are effectively solved. The test results show that the system control is stable and reliable, the performance indicators have reached the international advanced level.