日本バルカ 工业公司开发、销售可防止半导体制造装置漏气的密封材料。这种密封材料通常使用氟橡胶 ,但是氟橡胶因摩擦会产生填料微细碎屑的问题。新产品 (牌号为フソツド )中用于提高橡胶耐药品性和耐热性的添加剂含量少 ,为提高强度几乎不使用填料等 ,很难产生磨损碎屑 ;耐? Japan Vitalika Industries develops and sells sealants that prevent leaks in semiconductor manufacturing facilities. Fluoroelastomers are commonly used as such sealants, but fluorine rubber suffers from the problem of finely divided filler particles due to rubbing. The new product (FUNSODE) has a low content of additives for improving rubber chemical resistance and heat resistance, hardly generates wear debris for improving strength without using fillers,