研究了飞秒激光加工参量对刻写质量的影响,分析了激光能量吸收的多光子效应,测试了刻写通道的传输特性.实验结果表明,激光刻写的通道具有良好的波导特性:当激光脉冲能量在20μJ左右,扫描速度在300μm/s～400μm/s之间时,刻写通道的传输损耗小于1dB/cm,低于晶体的传输损耗,其原因是激光诱导锂离子的扩散引起了晶体内部局部折射率的增加. The effects of laser processing parameters on engraving quality were studied, and the multi-photon effect of laser energy absorption was analyzed and the transmission characteristics of engraved channels were tested.The experimental results show that the laser-engraved channels have good waveguide characteristics: when the laser pulse energy is in the range of 20μJ scan speed at between 300μm / s ~ 400μm / s, the write channel transmission loss less than 1dB / cm, lower than the transmission loss of the crystal, the reason is that the laser induced lithium ion diffusion caused by the internal crystal refractive index Increase.