基于锁相放大技术（PLA）和真空度自动控制技术设计了一种有很大实践意义的微力学结构动态参数测试系统。作为例子，给出了这套系统测得的Si谐振梁的非线性强迫振动（硬弹簧特性）在谐振点附近的从低频向高频扫描的幅频和相频曲线。 Based on the phase-locked amplification technology (PLA) and automatic control of vacuum degree, a kind of dynamic parameter test system of micromechanics structure has been designed. As an example, the amplitude-frequency and phase-frequency curves of low-frequency to high-frequency scanning of the nonlinear forced vibration (hard spring) of the Si resonant beam measured by this system are given near the resonance point.