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分析了模块化设计的优点和超精密加工机床设计的现状 ,提出了超精密加工机床模块化设计的设想 ,并利用了模块化超精密组件设计了几种典型的超精密机床。
The advantages of modular design and the status quo of ultraprecision machining machine are analyzed. The idea of modular design of ultraprecision machining machine is put forward. Several typical ultraprecision machine tools are designed by using modular ultraprecision components.