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叙述了波长移相干涉仪的基本原理,分析了其特点,对传统硬件移相干涉仪和波长移相干涉仪进行了比较,指出了它们的优缺点和应用范围。以美国NewFocus公司的可调谐半导体激光器为例,简述了实现波长调谐的硬件。文中将波长移相干涉仪算法分成三类:加权多步波长移相算法、基于傅里叶变换的波长移相算法和多波长算法,对这三类算法进行了较详细的叙述和分析,指出了各自的优缺点和应用范围。基于傅里叶变换的波长移相算法,提出了结合差分运算的适合于台阶测量的新算法,克服了已有算法中需要参考基准和参考面的缺点,提高了算法的实用性。
The basic principle of wavelength phase shifting interferometer is described. Its characteristics are analyzed. The traditional hardware phase shifting interferometer and wavelength phase shifting interferometer are compared, and their advantages, disadvantages and application scope are pointed out. Taking the tunable semiconductor laser of NewFocus Corporation in the United States as an example, the hardware for wavelength tuning is briefly described. In this paper, the wavelength phase-shifting interferometer algorithm is divided into three categories: weighted multi-step wavelength phase shift algorithm, based on Fourier transform wavelength shift algorithm and multi-wavelength algorithm, the three types of algorithms described in more detail and analysis, pointed out Their respective advantages and disadvantages and the scope of application. Based on Fourier transform wavelength shift algorithm, a new algorithm which is suitable for step measurement combining with differential operation is proposed, which overcomes the shortcomings of the existing reference and reference planes and improves the practicability of the algorithm.