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报告了氢化物气相外延技术中 ,在载气氮气氛中加入氢气对材料表面形貌及材料性质的影响。实验发现生长气氛中氢的存在会显著改进材料的质量 ,这种作用被归之于氢气氛下氨气在气相中的反应下降以及生长表面较低的氮的活动能力。
The effect of adding hydrogen on the surface morphology and material properties of hydride vapor phase epitaxy was reported. It was found that the presence of hydrogen in the growth atmosphere significantly improves the quality of the material. This effect is attributed to the reduction of the ammonia gas reaction in the gas phase under hydrogen atmosphere and the activity of nitrogen with lower surface growth.