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采用PZT振动产生移相,研制开发了可用于测量磁盘表面粗糙度的高精表面光学轮廓测量仪,本文在阐述系统工作原理之后,介绍其中的相移驱动装置的设计与实现。
The PZT vibration is used to generate the phase shift, and a high precision surface optical profilometer that can be used to measure the surface roughness of the magnetic disk is developed. After the system working principle is described, the design and implementation of the phase shift actuator are introduced.