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研究了基于绝缘衬底上的硅(SOI)材料的微环谐振器,实现了光滤波器的功能。采用电子束直写和干法刻蚀等工艺制作出SOI基微环谐振器,微环半径为74μm。测试结果表明,器件的自由频谱宽度(FSR)为1.238nm,1 550nm波长附近的抑制比大于10dB。通过对微环谐振器进行热调谐,在0~4V电压范围内实现了大于一个FSR的可调谐滤波特性。
The microring resonator based on silicon (SOI) material on an insulating substrate is studied, and the function of the optical filter is realized. The SOI-based micro-ring resonators were fabricated by electron beam direct writing and dry etching. The micro-ring radius was 74μm. The test results show that the free spectral width (FSR) of the device is 1.238nm, and the rejection ratio near 1 550nm wavelength is more than 10dB. By tuning the micro-ring resonators thermally, tunable filter characteristics of more than one FSR are achieved over a 0-4V range.