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本文报道NTD CZ Si从室温到1200℃退火的红外吸收光谱,研究了600～1300cm~(-1)波数区的一些中子辐照缺陷和氧与碳的红外吸收峰的退火行为和本质,以及中子辐照缺陷与间隙氧随退火温度变化的关系。
In this paper, the infrared absorption spectra of NTD CZ Si annealed at room temperature to 1200 ℃ are reported. Some of the neutron irradiation defects and infrared spectra of oxygen and carbon in 600 ~ 1300cm -1 wave number region are studied. RELATIONSHIP BETWEEN NUCLEAR IRRADIATION DEFECT AND INTERACTION OXYGEN LASTING WITH ANNEALING TEMPERATURE.