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通过对TiN/SiC、TiN/TiB_2和TiN/SiO_2纳米多层膜微结构和力学性能的研究,展示了通常溅射沉积态为非晶的SiC、TiB_2和SiO_2薄膜,在立方结构的TiN晶体层模板作用下的晶化现象,以及多层膜由此产生的生长结构和力学性能的变化．结果表明：SiC在层厚≤0．6nm时晶化为立方结构后,可以反过来促进TiN/SiC多层膜中TiN层的晶体完整性；TiB_2在层厚≤2．9nm时晶化为六方结构,并与TiN形成{111}TiN//{0001}TiB_2,<100>TiN//<11(?)0>TiB_2的共格关系；SiO_2在层厚≤0．9nm时晶化为立方结构的赝晶．多层膜中SiC、TiB_2和SiO_2品化后都与TiN形成共格外延的生长结构,并相应产生了硬度升高的超硬效应．随着SiC、TiB_2和SiO_2层厚的增加,它们又转变为非晶态,多层膜的共格外延生长受到破坏,其硬度亦明显降低．
The microstructures and mechanical properties of TiN / SiC, TiN / TiB_2 and TiN / SiO_2 nanocomposite films were investigated. The results show that the as-deposited amorphous SiC, TiB_2 and SiO_2 films are usually deposited in cubic TiN crystal layer The crystallization phenomenon under the action of the template, and the change of the growth structure and the mechanical property resulting from the multilayer film. The results show that the crystallinity of TiN layer in TiN / SiC multilayers can be reversed after the SiC layer is crystallized to cubic structure with thickness ≤0.6nm. TiB_2 crystallizes to hexagonal Structure and formed a coherent relationship with TiN of {111} TiN // {0001} TiB_2, <100> TiN // <11 (?) 0> TiB_2. SiO_2 crystallizes to a cubic structure when the layer thickness is less than or equal to 0.9 nm Of pseudo-crystal. In the multi-layer films, SiC, TiB 2 and SiO 2 are all formed into a coextensive growth structure with TiN after the chemical reaction, and the superhard effect of increasing hardness is produced accordingly. As the thickness of SiC, TiB 2 and SiO 2 increases, they turn into amorphous state again, and the coexistence growth of multilayer films is destroyed and the hardness of the multilayer films is obviously decreased.