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为解释电容式微加速度计闭环系统零点不惟一的特殊现象,对其力学模型和电路特性进行理论分析,推导了闭环输出、零偏、零偏重复性、检测盲区宽度等公式,建立新的静平衡模型。通过零偏与预载的关系实验,定量分析了零偏不重合度、零偏重复性等,并对实验数据进行误差分析。该静平衡模型揭示了动齿的运动规律,证明检测盲区宽度和零偏重复性成正比,成功解释了两个零点问题。指出提高零偏重复性指标的方法,对于微机械结构的设计、预载的选择也具有指导意义。
In order to explain the special phenomenon that the zero point of the closed-loop system of capacitive micro-accelerometer is not unique, the mechanical model and the circuit characteristics are analyzed theoretically. The closed-loop output, zero bias, zero-bias repeatability and blind zone width detection are deduced. model. Through the experiment of the relationship between zero bias and preload, the zero bias mismatch degree and zero bias repetitiveness are quantitatively analyzed, and the error of experimental data is analyzed. The static equilibrium model reveals the motion of the moving tooth and proves that the width of the detection dead zone is proportional to the zero bias repetitiveness and successfully explains the two zero points. It is pointed out that the method of improving the index of repeatability of zero bias is also instructive for the design of micromachined structure and the preload selection.