太赫兹反射式共焦扫描显微成像系统分辨率较高且可呈现物体三维像,因此具有很大的应用价值。针对一种连续太赫兹反射式共焦扫描显微成像实验光路,在所确定的系统参数条件下,计算分析了两种太赫兹波长(118.83μm和184.31μm)的系统轴向响应特性。仿真结果表明,所设计的波长118.83μm的成像实验装置横向分辨率可达0.23 mm,轴向分辨率约为4.27 mm;波长184.31μm的系统横向分辨率可达0.36 mm,轴向分辨率约为6.63 mm。探测器轴向偏移影响大于横向偏移影响。 Terahertz-reflectivity confocal scanning microscopy imaging system with high resolution and can render the object three-dimensional image, it has great application value. Aiming at the experimental optical path of a terahertz reflection confocal scanning microscopy imaging system, axial response characteristics of two systems with terahertz wavelengths (118.83μm and 184.31μm) were calculated and analyzed under the determined system parameters. The simulation results show that the design of the experimental device with a wavelength of 118.83μm can achieve a horizontal resolution of 0.23 mm and an axial resolution of 4.27 mm. The horizontal resolution of the system with a wavelength of 184.31μm can reach 0.36 mm and the axial resolution is about 6.63 mm. The effect of detector axial offset is greater than that of lateral offset.