Metal evaporation on the basis of the kinetic model equations (BGK and S-model) and the direct simulation Monte Carlo (DSMC) method was investigated computationally under the circumstances of collimators existing or not. Numerical data of distributions of number density, bulk velocity and temperature were reported over a wide range of evaporation rate. It was shown that these results reached a good agreement for the case of small evaporation rate, while the deviations became increasingly obvious with the increase of evaporation rate, especially when the collimators existed. Moreover, the deposi-tion thickness over substrate obtained from the kinetic model equations were inaccurate even though the evaporation rate was small. All of the comparisons showed the reliability of the kinetic model equations, which require less computational cost at small evaporation rate and simple structure.